Vistec Electron Beam Lithography Products

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Vistec offers the following e-beam products:

  • Vistec SB3050 / SB4050 Series: the SB3050 series enables direct patterning down to the 32nm technology node and features Variable Shape Beam (VSB) technology with vector scan and continuously moving stage principles for throughput optimization. The SB4050 was released in 2011 and the SB3050 in 2006.
  • Vistec: SB351: this system, released in 2004, has been developed for the 90nm node and features a 65nm R&D capability node.
Product Released: 
January, 2004
November, 2006
January, 2011
Information Verified: 
April, 2013

Californa Locations:

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