Applied SEMVision™ G5 System


The SEMVision G5 suite of in-line defect review and analysis products (G5, G5 HP, and G5 MAX) is the fifth generation of Applied Material's SEMVision defect inspection systems. This SEMVision technology was first released in 1998. The newest G5 system is capable of identifying and imaging relevant defects with 1nm pixel size, and is designed for 22nm logic and memory chips. The SEMVision G5 platform delivers high-throughput imaging of true defects as small as 20nm.


Product Released: 
December, 2011
Information Verified: 
March, 2013

Californa Locations:

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